The 68th JSAP Spring Meeting 2021

Presentation information

Print

Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.3 Novel technologies and interdisciplinary engineering

[16a-P04-1~6] 1.3 Novel technologies and interdisciplinary engineering

Tue. Mar 16, 2021 10:00 AM - 10:50 AM P04 (Poster)

10:00 AM - 10:50 AM

[16a-P04-3] Characteristics evaluation of V0.75Ti0.25O2 microbolometer fabricated by MOD

〇Yuhi Fujishiro1, Masami Kawahara2, Tsuyoshi Samura2, Takashi Tachiki1, Takashi Uchida1 (1.National Defense Academy, 2.Kojundo Chemical Lab.)

Keywords:metal organic decompsition, V0.75Ti0.25O2 thin films, bolometer