[16a-P08-1~12] 3.12 Nanoscale optical science and near-field optics

[16a-P08-6] Deep UV Surface Plasmon Resonance using Ga₂O₃ nano-particles on Al Substrate

〇Soshi Endo¹, Yuya Nakatsuka¹, Kohei Shimanoe¹, Tetsuya Matsuyama¹, Kenji Wada¹, Koichi Okamoto¹ (1.Osaka Pref. Univ.)

Keywords:Localized surface plasmon resonance, Metal nano structure, Semiconductor light emitting device

We have been working on the control of localized surface plasmon resonance (LSPR) using Ga nanohemisphere structures to improve the efficiency of deep-ultraviolet LEDs. In this study, we fabricated a nano-hemispherical structure of dielectric Ga₂O₃ on an Al substrate, which can significantly reduce the incident light loss compared to metallic Ga, and observed the spectrum. As a result, we have succeeded in obtaining LSPR peaks in the deep-ultraviolet wavelength region that are in good agreement with the calculated results.