[16a-Z13-1~12] 13.3 Insulator technology

[16a-Z13-1] Examination of Sputtered-AlN Buffer Layer on ScAlMgO4

〇Keisuke Hozo¹, Dong-Pyo Han¹, Ryoya Mano¹, Ryo Takahashi¹, Ryoto Fujiki¹, Ryoya Hiramatu¹, Kanato Sawai¹, Satoshi Kamiyama¹, Tetuya Takeuchi¹, Motoaki Iwaya¹, Isamu Akasaki², Tsuguo Fukuda³, Takashi Fujii³ (1.Meijo Univ., 2.Akasaki Research Center, Nagoya Univ., 3.Fukuda X-tal Laboratory)

Keywords:AlN buffer layer