The 68th JSAP Spring Meeting 2021

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[16a-Z13-1~12] 13.3 Insulator technology

Tue. Mar 16, 2021 9:00 AM - 12:15 PM Z13 (Z13)

Shinichi Takagi(Univ. of Tokyo)

12:00 PM - 12:15 PM

[16a-Z13-12] Dependence of Thermal Conductivity Along Si/SiO2 Interface on Substrate Surface Orientation

〇Yuji Yamanaka1, Junya Takizawa1, Motohiro Tomita1, Takanobu Watanabe1 (1.Waseda Univ.)

Keywords:semiconductor