[16a-Z15-1~7] 6.6 Probe Microscopy

[16a-Z15-3] Cross-sectional investigation of direct bonded p-n junction by dual bias modulation electrostatic force microscopy

〇(DC)Ryota Fukuzawa¹, Jianbo Liang³, Naoteru Shigekawa³, Takuji Takahashi^1,2 (1.IIS, The Univ. of Tokyo, 2.NanoQuine, NanoQuine, 3.Grad. School of Eng., Osaka City Univ.)

Keywords:interface trap, electrostatic force microscopy, Atomic force microscopy