The 68th JSAP Spring Meeting 2021

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[16a-Z23-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

Tue. Mar 16, 2021 9:00 AM - 12:00 PM Z23 (Z23)

Haruhiko Udono(Ibaraki Univ.), Kenji Yamaguchi(QST)

9:30 AM - 9:45 AM

[16a-Z23-3] High Refractive Index and Low Extinction Coefficient in Infrared Spectrum of Polycrystalline β-FeSi2 Thin Film Prepared by Co-sputtering

〇(M2)Xuanwei Zhang1, Kyoko Namura1, Motofumi Suzuki1 (1.Kyoto Univ.)

Keywords:iron silicide, Co-sputtering, Extinction coeffcient