The 68th JSAP Spring Meeting 2021

Presentation information

Print

Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[16a-Z23-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

Tue. Mar 16, 2021 9:00 AM - 12:00 PM Z23 (Z23)

Haruhiko Udono(Ibaraki Univ.), Kenji Yamaguchi(QST)

11:00 AM - 11:15 AM

[16a-Z23-8] Effect of in situ annealing on BaSi2 evaporated films with low deposition rate

〇Souma Nishio1, Shunnosuke Mori1, Katsushi Nishino1 (1.Tokushima Univ.)

Keywords:barium disilicide, silicide semiconductor