[16a-Z30-1~11] 17.1 Carbon nanotubes & other nanocarbon materials

[16a-Z30-3] Effect of roughness of alumina substrate on CNT growth by alcohol CVD

〇Ryo Kawachi¹, Masanori Hara¹, Masamichi Yoshimura¹ (1.Toyota Tech. Inst.)

Keywords:carbon nanotube, chemical vapor deposition

I focused on the substrate on which carbon nanotubes grow and investigated the relationship between the composition, surface roughness, and carbon nanotubes. The substrate was prepared not only by the deposition of aluminum by sputtering but also by forming an alumina layer using ALD and etching using sodium hydroxide. And, carbon nanotubes were grown by carrying out catalyst support by arc plasma vapor deposition and chemical vapor deposition.