[16p-P05-1~7] 6.2 Carbon-based thin films

[16p-P05-3] Gas-sorption and surface properties of sputtered films prepared from sintered polymers

〇Yoriko Suda¹, Tsukasa Iizuka¹, Naoya Sakamoto¹, Iwao Sugimoto¹, Kazuhiko Takahashi² (1.Tokyo Univ. of Tech., 2.Doshisya Univ.)

Keywords:carbonaceous film, gas sorption