[16p-Z08-1~17] 3.8 Optical measurement, instrumentation, and sensor

[16p-Z08-4] Snap shot 3D profilometry by color polarization camera

〇Yuuki Maeda¹, Shuhei Shibata¹, Nathan Hagen¹, Yukitoshi Otani¹ (1.Utsunomiya Univ.)

Keywords:polarization, profilometry

Many stereo optical methods have difficulty measuring inside deep holes or nearby large step heights due to occlusion, because a projection axis and an imaging axis are non-coaxial. In these cases, uniaxial profilometry methods are more practical. We have proposed an uniaxial three-dimensional profilometry system illuminating the sample with a spatially-varying polarization pattern and measuring a polarization camera to measure a sample by single shot. We present a new measurement method using a color polarized camera.