[16p-Z10-1~17] 3.15 Silicon photonics and integrated photonics

[16p-Z10-8] Fabrication of multi-wavelength membrane laser array on Si using selective epitaxial growth on InP-on-insulator substrate

〇Takuro Fujii¹, Tomonari Sato¹, Nikolaos-Panteleimon Diamantopoulos¹, Koji Takeda¹, Takuma Tsurugaya¹, Hidetaka Nishi¹, Tai Tsuchizawa¹, Shinji Matsuo¹ (1.NTT Device Technology Labs)

Keywords:semiconductor laser, silicon photonics, epitaxial growth

We propose integration of various photonic devices, including lasers, on Si using epitaxial growth technique on InP-on-insulator substrate. In this study, we successfully demonstrate the selective growth of MQWs that have 150-nm-range different bandgaps. We also fabricate a 155-nm-range multi-wavelength single-mode laser array on Si.