Graphene formation and growth process using atmospheric pressure<br />remote plasma-enhanced chemical vapor deposition

Presentation information

Oral presentation

8 Plasma Electronics » 8.8 Division of Plasma Electronics 30th Anniversary Special Session

Tue. Mar 16, 2021 1:00 PM - 7:45 PM Z12 (Z12)

Haruaki Akashi(National Defence Academy), Makoto Matsui(Shizuoka Univ.), Hiroshi Kuwahata(Tokai Univ.), Yoshihiro Umezawa(東京エレクトロン宮城)

5:30 PM - 5:45 PM

〇(M1)Yusuke Sakai¹, Takeda Keigo¹, Hiramatsu mineo¹ (1.Meijo Univ.)

Keywords:graphene, CVD