The 68th JSAP Spring Meeting 2021

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CS Code-sharing session » 【CS.5】 Code-sharing Session of 6.1 & 13.3 & 13.5

[16p-Z26-1~15] CS.5 Code-sharing Session of 6.1 & 13.3 & 13.5

Tue. Mar 16, 2021 1:30 PM - 5:30 PM Z26 (Z26)

Norifumi Fujimura(Osaka Pref. Univ.), Eisuke Tokumitsu(JAIST)

4:15 PM - 4:30 PM

[16p-Z26-11] Substrate dependence of crystalline phase of ZrO2 thin film for high temperature deposition

〇Jotaro Nagano1, Shigehisa Shibayama1, Mitsuo Sakashita1, Osamu Nakatsuka1,2 (1.Nagoya Univ., 2.IMaSS, Nagoya Univ.)

Keywords:ZrO2, ferroelectric