2:30 PM - 2:45 PM
[16p-Z32-5] Characterization and optimization of planar-type uni-leg silicon thermoelectric generator
Keywords:thermoelectrics, silicon, energy harvest
We fabricated planar-type uni-leg silicon thermoelectric generator with nano-structured silicon membrane. We measured resistance and thermopower of device with different membrane width and length, and found that optimal width and length are determinded by relation between resistance and area for width and relation between thermopower and resistance for length respectively.