1:15 PM - 1:30 PM
[16p-Z34-1] Ion beam analysis system for simultaneous multi-element analysis on the micro ion beam equipment for structural materials
Keywords:micro beam, ion beam analysis, transmission ERDA
A micro ion beam equipment for structural materials has been installed at the 0 degrees beam line of the 6 MV tandem accelerator at the University of Tsukuba. A beam spot diameter of about 1.5 μm is achieved with a proton beam of 3 to 6 MeV and a 4He2+ beam of 8 to 10 MeV. The ion beam analysis system is equipped with several detectors for measuring various types of radiation, and the sample can be observed from the front of the beam irradiation. Currently, we are developing a simultaneous multi-element analysis method using PIXE and transmission ERDA.