The 68th JSAP Spring Meeting 2021

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Poster presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[17a-P05-1~10] 6.3 Oxide electronics

Wed. Mar 17, 2021 10:00 AM - 10:50 AM P05 (Poster)

10:00 AM - 10:50 AM

[17a-P05-4] Fabrication of a Freestanding λ-Ti3O5 Epitaxial Thin Film by Chemical Lift-off

〇Gou Jin1, Yasushi Hirose1, Tetsuya Hasegawa1 (1.Univ. of Tokyo)

Keywords:chemical lift-off, sacrificial layer, freestanding thin film