[17a-P07-1~8] 6.4 Thin films and New materials

[17a-P07-2] Film formation of tantalum oxide film using ionic liquid

〇Nana Hozuki^1,2, Kenichi Kaminaga¹, Shingo Maruyama¹, Hiroshi Kumigashira³, Hidetaka Takato², Michio Kondo², Yuji Matsumoto¹ (1.Tohoku Univ., 2.AIST(FREA), 3.Tohoku Univ. IMRAM)

Keywords:ionic liquid, tantalum oxide, vacuum deposition