Study on surface structure analysis of VO2 thin films prepared on r-plane sapphire substrates by mist CVD method

Haruki Maeda; Eita Nakayama; Hiroshi Tabata; Osamu Kubo; Mitsuhiro Katayama; Makoto Kimura; Yuya Matamura; Takumi Ikenoue

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.5 Surface Physics, Vacuum

[17a-Z06-1~8] 6.5 Surface Physics, Vacuum

Wed. Mar 17, 2021 9:45 AM - 12:00 PM Z06 (Z06)

Kei Mitsuhara(Ritsumeikan Univ.)

11:30 AM - 11:45 AM

[17a-Z06-7] Study on surface structure analysis of VO2 thin films prepared on r-plane sapphire substrates by mist CVD method

〇Haruki Maeda¹, Eita Nakayama¹, Hiroshi Tabata¹, Osamu Kubo¹, Mitsuhiro Katayama¹, Makoto Kimura², Yuya Matamura², Takumi Ikenoue² (1.Osaka Univ., 2.Kyoto Univ.)

Keywords:Surface

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