Consideration on the ellipsometric resolution of imaging ellipsometry

Presentation information

Oral presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

Wed. Mar 17, 2021 9:00 AM - 12:00 PM Z08 (Z08)

Yosuke Mizuno(Yokohama National University), Michiko Nishiyama(Soka Univ.)

9:45 AM - 10:00 AM

〇Lianhua Jin¹, Eiichi Kondoh¹, Yuki Iizuka¹, Motoyuki Ohtake¹, Bernard Gelloz² (1.Univ. Yamanashi, 2.Nagoya Univ.)

Keywords:Ellipsometry, Resolution