[17a-Z13-1~9] 1.6 超音波

▼ [17a-Z13-8] Ultrasound velocity enhancement using gold nanoparticles and its multifunctional sensor application

〇(D)Teguh Firmansyah Talam^1,2、Gunawan Wibisono²、Eko Tjipto Rahardjo²、Jun Kondoh¹ (1.Shizuoka Univ.、2.Univ of Indonesia)

キーワード：Gold nanoparticles, SH-SAW sensor, Velocity enhancement

Shear-horizontal surface acoustic wave (SH-SAW) device has excellent characteristics for a sensor, due to large electromechanical coupling (K_s²). The K_s² value is highly correlated with the ultrasound velocity. SH-SAW sensor was usually fabricated on a 36XY-LiTaO3 substrate using a developed input/output interdigital transducers (I/O IDTs). We propose deposition gold nanoparticles (AuNPs) on the SH-SAW propagation surface between I/O IDTs to enhance ultrasound velocity. The verification of ultrasound velocity enhancement was conducted by frequency-domain and time-domain measurement. In general, the SH-SAW with the AuNPs sensor has higher V and K_s² with the possibility of a multifunctional sensor.