[17a-Z15-1~7] 6.2 Carbon-based thin films

[17a-Z15-2] Comparison of surface-enhanced Raman spectroscopy and normal Raman spectroscopy results in a-C:H films synthesized by DC plasma CVD

〇(M1)Ryosei Iwai¹, Hiroyuki Kousaka², Takayuki Tokoroyama³, Yuya Nakashima^3,4, Tatsuya Furuki², Noritsugu Umehara³ (1.Gifu Univ. Grad. Sch., 2.Gifu Univ., 3.Nagoya Univ. Grad. Sch., 4.Fuji Electric)

Keywords:diamond-Like Carbon, DC plasma CVD, surface-enhanced Raman spectroscopy

The top surface structure of a DLC film is said to be different from the average structure of the entire film. In this study, we compared the top surface structure of a-C:H films deposited under different applied voltages with the average structure of the interior by Surface-Enhanced Raman Spectroscopy and conventional Raman spectroscopy. As a result, the hydrogen content and I(D)/I(G) were larger at the top surface of the film. The hydrogen content of the entire film decreased and I(D)/I(G) increased with increasing applied voltage, while no such correlation was observed at the top surface of the film.