The 68th JSAP Spring Meeting 2021

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15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

[17a-Z28-1~10] 15.6 Group IV Compound Semiconductors (SiC)

Wed. Mar 17, 2021 9:00 AM - 11:45 AM Z28 (Z28)

Shunta Harada(Nagoya Univ.)

11:30 AM - 11:45 AM

[17a-Z28-10] Evaluation of the effect of the ion implantation process on carrier lifetimes in 4H-SiC SJ-UMOSFET

〇Takuya Fukui1, Takeshi Tawara2, Masashi Kato1 (1.NITech., 2.AIST)

Keywords:carrier lifetime, SiC, SJ-structure