[17p-Z11-1~6] Forefront and prospects of ion beam analysis

[17p-Z11-2] Ion Beam Material Characterization of Electrode and Solid Electrolyte for Lithium Ion Battery

〇Masahiro Saito¹ (1.Toray Research Center)

Keywords:lithium ion battery, all solid state battery, RBS

Ion beam analysis is very useful for material charaterization of lithium ion batteries. For examplem damage-free depth profiling can be performed, which is sometimes difficult by using ion etching like XPS. In this presentation, accurate depth profiling of negative electrode will be presented.