The 68th JSAP Spring Meeting 2021

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Symposium (Oral)

Symposium » Forefront and prospects of ion beam analysis

[17p-Z11-1~6] Forefront and prospects of ion beam analysis

Wed. Mar 17, 2021 1:30 PM - 4:45 PM Z11 (Z11)

Hidetsugu Tsuchida(Kyoto University), Kimikazu Sasa(U. Tsukuba)

3:45 PM - 4:15 PM

[17p-Z11-5] Development and Application of Submicron Ion Beam Analysis System

〇Shigeo Matsuyama1, Misako Miwa1, Sho Toyama1, Yohei Kikuchi1 (1.Tohoku Univ.)

Keywords:Microbeam Analysis, submicron