The 68th JSAP Spring Meeting 2021

Presentation information

Oral presentation

9 Applied Materials Science » 9.2 Nanoparticles, Nanowires and Nanosheets

[17p-Z18-1~16] 9.2 Nanoparticles, Nanowires and Nanosheets

Wed. Mar 17, 2021 1:00 PM - 5:15 PM Z18 (Z18)

Katsuhiro Tomioka(Hokkaido Univ.), Kazuki Nagashima(Univ. Tokyo)

2:15 PM - 2:30 PM

[17p-Z18-6] Anomalous Reversible Sn-Dopant Deactivation between Indium Tin Oxide and Single-Crystalline Oxide Nanowire

〇(P)HAO ZENG1, Tsunaki Takahashi1,2, Takehito Seki1, Masaki Kanai3, Guozhu Zhang1, Takuro Hosomi1,2, Kazuki Nagashima1,2, Naoya Shibata1, Takeshi Yanagida1,3 (1.Tokyo Univ., 2.(JST), PRESTO, 3.Kyushu Univ.)

Keywords:Nanowire, Nano device, Interface

Implantation of an impurity dopant into a semiconductor is a common and irreversible technique to manipulate the electrical properties of modern electronics. Here, we present an anomalous dopant activation/deactivation behavior, which is reversible and only occurs at the interface between indium tin oxide (ITO) and single-crystalline oxide channel. We found that the conductance of the interface between ITO contact and single-crystalline oxide nanowire can be repeatedly manipulated between a metallic state and a near-insulative state via utilizing thermal annealing in air or vacuum. Interestingly, this electrical switching phenomenon cannot be observed when using the lithography-defined polycrystalline oxide nanowire instead of single-crystalline nanowire. Further atmosphere-controlled thermal treatments show that the oxygen in atmospheric air induces the reversible variation in the conductance of the interface between ITO contact and single-crystalline oxide nanowire. Systematic investigations on metal cation species and channel crystallinity indicate that the electrical switching phenomenon can be explained by an interface-specific reversible Sn-dopant activation/deactivation of ITO electrode in contact with a single-crystalline oxide channel.