[17p-Z22-1~9] 11.4 Analog applications and their related technologies

[17p-Z22-1] Fabrication of 2 THz wave-guide type Hot electron bolometer mixer (2)

〇Akira Kawakami¹, Yoshihisa Irimajiri¹, Ming-Jye Wang², Wei-Chun Lu², Yuji Hishida¹, Hirotaka terai¹ (1.NICT, 2.ASIAA(Taiwan))

Keywords:hot electron bolometer mixer, waveguide, THz

We investigated a 2 THz band waveguide type Ni-HEBM (WG-HEBM) using a silicon nitride (Si₃N₄) membrane structure, and reported on the NbN ultrathin film formation method on Si₃N₄ and the membrane structure formation method using MgO inorganic resist. This time, we describe the influence of the shape of the membrane bridge due to cooling, the characteristics, and the mixer operation of the 2 THz band WG-HEBM.