[17p-Z22-1~9] 11.4 Analog applications and their related technologies

[17p-Z22-5] Development of radiation camera with an array of 480 LEKIDs

〇Natsuko Ninomiya¹, Masato Naruse¹, Toru Taino¹, Hiroaki Myoren¹ (1.Saitama Univ.)

Keywords:Kinetic Inductance Detector, radiation detector

Among the mechanical inductance detectors that are radiation detectors, we focused on LEKID, which can read out 1000 elements at a time, and conducted research with the aim of developing a radiation camera that has a large detection area while maintaining position resolution. .. Nb is deposited on a 3-inch Si wafer, 480 LEKIDs are created by photolithography, and the performance is evaluated by irradiating alpha rays in a 1K freezer.