Study of the dielectric function models in the optical characterization of Al<sub>1-x</sub>In<sub>x</sub>N alloys by using spectroscopic ellipsometry

Hayata Toyoda; Yuto Murakami; Rino Miyata; Daichi Imai; Takao Miyajima; Makoto Miyoshi; Tetsuya Takeuchi

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[17p-Z27-1~14] 15.4 III-V-group nitride crystals

Wed. Mar 17, 2021 1:00 PM - 5:00 PM Z27 (Z27)

Mark Holmes(Univ. of Tokyo), Shuhei Ichikawa(Osaka Univ.), Takao Oto(Yamagata Univ.)

4:00 PM - 4:15 PM

[17p-Z27-11] Study of the dielectric function models in the optical characterization of Al_1-xIn_xN alloys by using spectroscopic ellipsometry

〇Hayata Toyoda¹, Yuto Murakami¹, Rino Miyata¹, Daichi Imai¹, Takao Miyajima¹, Makoto Miyoshi², Tetsuya Takeuchi¹ (1.Meijo Univ., 2.Nagoya Inst. of Tech.)

Keywords:AlInN, spectroscopic ellipsometry, dielectric function

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Presentation information

[17p-Z27-1~14] 15.4 III-V-group nitride crystals

[17p-Z27-11] Study of the dielectric function models in the optical characterization of Al1-xInxN alloys by using spectroscopic ellipsometry

[17p-Z27-11] Study of the dielectric function models in the optical characterization of Al_1-xIn_xN alloys by using spectroscopic ellipsometry