The 68th JSAP Spring Meeting 2021

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3 Optics and Photonics » 3.11 Photonic structures and phenomena

[17p-Z31-1~15] 3.11 Photonic structures and phenomena

Wed. Mar 17, 2021 1:15 PM - 5:30 PM Z31 (Z31)

Yasutomo Ota(Univ. of Tokyo), Hisashi Sumikura(NTT), Yasushi Takahashi(Osaka Pref. Univ.)

5:15 PM - 5:30 PM

[17p-Z31-15] Fabrication of GaN microdisks by photoelectrochemical etching of a thick InGaN sacrificial layer.

〇Kenshin Shimoyoshi1, Syun Ukita1, Kazuo Uchida1, Takeyoshi Tajiri1 (1.Dentsu Univ.)

Keywords:photoelectrochemical etching, nitride Semiconductor, microdisk