[18a-Z01-1~11] [Open Symposium] Semiconductors Essential to Accelerating DX Technology in "With Corona" Era

[18a-Z01-6] Contribution to semiconductor industry via measurement technique of HORIBA

〇Shota SOMEYA¹ (1.HORIBA Ltd)

Keywords:Measurement, Semiconductor

Many kind of measurement technique are required in semiconductor industry to control/ monitor its process. HORIBA is contributing to overall semiconductor process via highly precise flow control, chemical concentration control, reticle particle measurement by laser scattering. Making concrete image to semiconductor industry by explaining HORIBA semiconductor related product. Then more concrete semiconductor job will be explained with my 5 years overseas stay