The 68th JSAP Spring Meeting 2021

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3 Optics and Photonics » 3.7 Laser processing

[18a-Z04-1~11] 3.7 Laser processing

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z04 (Z04)

Daisuke Nakamura(Kyushu Univ.), Yuji Sato(Osaka Univ.)

9:45 AM - 10:00 AM

△ [18a-Z04-4] Formation of picosecond laser induced nano periodic structure of DLC on SiC

〇Ken Yamamoto1, Takashi Takahashi2, Yoshiharu Utsumi3, Akinori Shibata4, Makoto Yamaguchi5, Yohei Kobayashi2, Takuro Tomita1 (1.Tokushima Univ., 2.Univ. of Tokyo, 3.Nippon ITF Inc., 4.NISSIN ELECTRIC, 5.Akita Univ.)

Keywords:laser induced nano periodic structure