[18a-Z04-1~11] 3.7 Laser processing

△ [18a-Z04-7] Evaluation of size distribution of SiC nanoparticles fabricated by laser ablation in liquid and vacuum

〇Mitsuki Ikeda¹, Ishihara Jun¹, Miyajima Kensuke¹ (1.Tokyo Univ. of Science)

Keywords:ablation, nanoparticles, laser

We found that 3C-SiC nanoparticles were mainly produced by laser ablation of 4H-SiC substrates.However, it is still unknown how external environmental factors affect nanoparticle production by ablation. In this study, we prepared nanoparticles by laser ablation in liquid and vacuum, and examined the effect on the generated particles.