The 68th JSAP Spring Meeting 2021

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[18a-Z27-1~9] 15.4 III-V-group nitride crystals

Thu. Mar 18, 2021 9:00 AM - 11:30 AM Z27 (Z27)

Tsutomu Araki(Ritsumeikan Univ.), Atsushi Kobayashi(Univ. of Tokyo)

11:00 AM - 11:15 AM

[18a-Z27-8] Growth of coherent AlN/AlGaN heterostructures and its application to transistors

〇Ryota Maeda1, Kohei Ueno1, Atsushi Kobayashi1, Hiroshi Fujioka1 (1.IIS, The Univ. of Tokyo)

Keywords:AlGaN, Sputtering