The 68th JSAP Spring Meeting 2021

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16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[18a-Z29-1~8] 16.3 Bulk, thin-film and other silicon-based solar cells

Thu. Mar 18, 2021 10:00 AM - 12:15 PM Z29 (Z29)

Atsushi Ogura(Meiji Univ.)

10:45 AM - 11:00 AM

[18a-Z29-4] Fabrication of TOPCon structure using sputtered a-Si:H layers

〇Takumi Miyamoto1, Yuta Shiratori1,2, Shinsuke Miyajima1 (1.Tokyo Tech, 2.JSPS research Fellow (DC1))

Keywords:sputtering, TOPCon structure, SiH4 free technology