[18p-Z09-1~14] 3.9 テラヘルツ全般

▼ [18p-Z09-2] Performance Improvement of THz Microbolometer by Folded - Dipole Antenna

〇(D)Arie Pangesti Aji^1,3、Hiroaki Satoh²、Catur Apriono³、Eko Tjipto Rahardjo³、Norihisa Hiromoto¹、Hiroshi Inokawa² (1.GSST, Shizuoka Univ.、2.RIE, Shizuoka Univ.、3.Univ. Indonesia)

キーワード：terahertz, folded dipole antenna, silicon

In a terahertz (THz) antenna-coupled microbolometer, the incoming THz waves are captured by the antenna and transferred to the load resistor (heater) to dissipate power. The voltage signal output is then obtained in the thermistor part which is thermally connected to the heater. Here the thermal or electrical conductivity of the heater and thermistor plays a key role to increase the responsivity of the microbolometer. The conductivity needs to be decreased by downscaling the structure dimensions. However, as the resistance of the heater part increase, it may cause an impedance mismatch issue with the antenna part, if a low-impedance antenna such as half-wave dipole is incorporated. Therefore, the folded dipole antenna (FDA) is advantageous to resolve this issue due to its larger characteristic impedance. In this work, we assessed the improvement attained by an FDA-coupled microbolometer based on electromagnetic (EM) simulation in transmitting (Tx) and receiving (Rx) mode.