[18p-Z14-1~4] 7.1 X-ray technologies

[18p-Z14-4] Development of soft X-ray microscope with a Wolter mirror at Photon Factory BL11D

〇Norio Watanabe¹, Sadao Aoki^2,1 (1.Univ. Tsukuba, 2.CROSS)

Keywords:mirror, soft X-ray, microscope

A full-field soft X-ray microscope using a Wolter mirror was assembled at the Photon Factory BL11D, and imaging tests were performed at 60-900 eV. Transmitted images of a sample were magnified 19 times by a Wolter mirror and recorded by a CCD camera. It was possible to perform spectroscopic imaging of diamond powder up to 900 eV.