[18p-Z17-1~20] 8.1 Plasma production and diagnostics

△ [18p-Z17-1] Electron temperature and density diagnostics of the atmospheric pressure argon plasma jet for surface cleaning based on optical emission spectroscopic measurement

〇Yuya Yamashita¹, Takuya Akiba¹, Toshihide Iwanaga¹, Hidehiko Yamaoka¹, Shuichi Date¹, Hiroshi Akatsuka² (1.TIRI, 2.Tokyo Tech)

Keywords:collisional-radiative model, optical emission spectroscopy measurement, atmospheric pressure argon plasma jet

Electron temperature and density of the atmospheric pressure argon plasma jet for surface cleaning of wafers were diagnosed based on optical emission spectroscopic measurement. The diagnose was based on fitting with the excitation-level number density distribution of the theoretical value based on the collisional-radiative model and the experimental value based on the optical emission lines which upper levels are 4p’[3/2]₁, 4p’[1/2]₁, 4p[1/2]₀, and 4p’[1/2]₀ . The electron temperature and density were decreased in the downstream of discharge tube.