6:00 PM - 6:15 PM
[18p-Z17-17] Gas Mixing and Pulse Microwaves Effects and Impurities Characteristic on Electron Cyclotron Resonance Multicharged Ion Source
Keywords:plasma, electron cyclotron resonance
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and diagnostics
Thu. Mar 18, 2021 1:30 PM - 7:00 PM Z17 (Z17)
Hiroshi Akatsuka(Tokyo Tech), Kentaro Tomita(Hokkaido Univ.), Manabu Tanaka(Kyushu Univ.)
6:00 PM - 6:15 PM
Keywords:plasma, electron cyclotron resonance