The 68th JSAP Spring Meeting 2021

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[18p-Z17-1~20] 8.1 Plasma production and diagnostics

Thu. Mar 18, 2021 1:30 PM - 7:00 PM Z17 (Z17)

Hiroshi Akatsuka(Tokyo Tech), Kentaro Tomita(Hokkaido Univ.), Manabu Tanaka(Kyushu Univ.)

6:00 PM - 6:15 PM

[18p-Z17-17] Gas Mixing and Pulse Microwaves Effects and Impurities Characteristic on Electron Cyclotron Resonance Multicharged Ion Source

〇Kazuki Tsuda1, Shuhei Harisaki1, Wataru Kubo1, Issei Owada1, Koichi Sato1, Yushi Kato1 (1.Osaka Univ.)

Keywords:plasma, electron cyclotron resonance