[18p-Z18-17~19] 8.6 Plasma Electronics English Session

▲ [18p-Z18-18] In-vacuum active color sensor and application to in-situ detection of plasma emissions

〇Osamu Sakai¹, Takayuki Kitagawa², Keiji Sakurai¹, Go Itami¹, Shigeyuki Miyagi¹, Kazuyuki Noborio², Kohshi Taguchi² (1.Univ. Shiga Pref., 2.Sakigake Semicon.)

Keywords:sensor, vacuum, wireless communication

Plasma diagnostics play crucial roles in monitoring of ongoing processes and characterization of plasma properties. The previous efforts for precise measurements with high resolutions have increased our understandings for these research targets successfully, although we frequently face with difficulties related to large expenses and high technical levels that are required for operations. In the meanwhile, IoT (Internet of Things) technology and big-data handling methods from a huge number of low-cost sensors open new diagnostics in many social areas, but vacuum conditions with exotic natures have prevented IoT sensors from entering internal spaces of low-pressure plasma reactors. In this study, we design an in-vacuum active color sensor for plasma emissions and confirm its validity for a wireless data acquisition system.