The 68th JSAP Spring Meeting 2021

Presentation information

Oral presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18p-Z33-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Thu. Mar 18, 2021 1:00 PM - 6:00 PM Z33 (Z33)

Tetsuya Yamamoto(Kochi Univ. of Tech.), Keisuke Ide(Tokyo Tech), Kohei SHIMA(Tohoku Univ.)

5:00 PM - 5:15 PM

[18p-Z33-14] Epitaxial growth of high Mg composition Ni1-xMgxO thin film by mist CVD

〇(M1)Yihua Sun1, Takumi Ikenoue1, Masao Miyake1, Tetsuji Hirato1 (1.Kyoto Univ.)

Keywords:Mist CVD, NiMgO