High-Magnification Imaging Objective for Lab-Scale Extreme Ultraviolet Microscope

Presentation information

Poster presentation

7 Beam Technology and Nanofabrication » 7 Beam Technology and Nanofabrication(Poster)

Fri. Mar 19, 2021 9:00 AM - 9:50 AM P01 (Poster)

9:00 AM - 9:50 AM

〇Shuntarou Waki¹, Jun Chen¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)

Keywords:EUV Microscope