[19a-P02-1~9] 8 Plasma Electronics(Poster)

[19a-P02-4] Plasma Fluctuation by Insertion of a Small Grounded Electrode into Inductively Coupled Plasma with Insulated Liner

〇Yukinori Chiba¹, Manabu Kyuzo¹, Haruka Suzuki¹, Hirotaka Toyoda^1,2 (1.Nagoya Univ., 2.NIFS)

Keywords:Inductively Coupled Plasma, Liner