The 68th JSAP Spring Meeting 2021

Presentation information

Oral presentation

3 Optics and Photonics » 3.7 Laser processing

[19a-Z07-1~11] 3.7 Laser processing

Fri. Mar 19, 2021 9:00 AM - 12:00 PM Z07 (Z07)

Mitsuhiro Terakawa(Keio Univ.), Ryohei Yasukuni(NAIST)

11:30 AM - 11:45 AM

[19a-Z07-10] Holographic ultraviolet nanosecond laser processing using adaptive optics

Satoshi Hasegawa1, Mizuki Kato1, Yoshio Hayasaki1 (1.Utsunomiya Univ.)

Keywords:adaptive optics, ultraviolet laser processing, computer-generated hologram

本研究では,CGHを用いたビーム整形によるポリイミドのレーザー加工について述べる.また,補償光学により加工光学系に含まれる収差を補正し,加工の高精度化を行なう.