9:00 AM - 9:15 AM
△ [19a-Z08-1] Casimir-Lifshitz Force Dominated Minimum Spacing of Single Crystal Silicon Cleavage Plane Nanogap
Keywords:Casimir-Lifshitz force, nanogap, MEMS
It was difficult to fabricate and sustain the plate-plate nanogap with a gap of few to tens nm which has a large facing area and uniform spacing. In this study, a single crystal silicon beam was cleaved by MEMS to fabricate a nanogap with large-area smooth surface, and the phenomenon that the minimum spacing was limited by the Casimir-Lifshitz force was observed and evaluated by measuring the pull-in characteristic of the gap. In the experiment, pull-in occurred at a gap of 10-15 nm, which was in good agreement with the numerical calculation.