10:30 AM - 11:00 AM
[19a-Z09-6] [The 4th Optical Engineering Achievement Award Speech] Lens Optics Old but Novel
Keywords:Lens Design, Phase Shifting Mask, Lens Optics
Oral presentation
3 Optics and Photonics » 3.2 Equipment optics and materials
Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z09 (Z09)
Ryuichi Katayama(Fukuoka Inst. of Tech.), Yasuaki Kumamoto(Osaka University)
10:30 AM - 11:00 AM
Keywords:Lens Design, Phase Shifting Mask, Lens Optics