[19a-Z17-1~8] 8.3 Plasma nanotechnology

[19a-Z17-5] Mechanical Characteristics of millefeuille type a-C:H films incorporating Carbon Nanoparticle Layer

〇Kazunori Koga^1,2, SungHwa Hwang¹, Yuan Hao¹, Kunihiro Kamataki¹, Takamasa Okumura¹, Naho Itagaki¹, Masaharu Shiratani¹ (1.Kyushu Univ., 2.NINS)

Keywords:DLC, Plasma, Nanoparticles