2021年第68回応用物理学会春季学術講演会

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10 スピントロニクス・マグネティクス » 10.4 半導体スピントロニクス・超伝導・強相関

[19a-Z19-1~12] 10.4 半導体スピントロニクス・超伝導・強相関

2021年3月19日(金) 09:00 〜 12:15 Z19 (Z19)

ファム ナムハイ(東工大)、高村 陽太(東工大)

11:45 〜 12:00

[19a-Z19-11] Effect of forming gas annealing on the enhancement of the electron spin lifetime in the inversion channel of Si-based spin MOSFETs

〇(P)Shoichi Sato1,2、Shota Okamoto1、Masaaki Tanaka1,2、Ryosho Nakane1 (1.EEIS, Tokyo Univ.、2.CSRN, Tokyo Univ)

キーワード:Semiconductor Spintronics, Silicon, MOSFET

Long spin lifetime is essential for highly-efficient spin transport in Si-based spin MOSFETs [1]. Our previous study revealed that the spin lifetime τS is proportional to the electron momentum lifetime τ, and the ratio τS/τ (~25000) was almost constant, irrespective of the applied gate voltage VGS, indicating that the Elliott-Yafet mechanism governs the spin relaxation. From this result, the enhancement of τS is expected with increasing τ. In this study, we perform a forming gas annealing (FGA), which is effective for increasing τ, on a spin MOSFET and studied the changes of τS and τ by FGA at various temperatures T. We found that FGA increases τS along with τ, whereas the ratio τS/τ remains almost constant (~25000). Therefore, we conclude that longer τ leads to longer τS in the Si inversion channel.