[19a-Z27-1~9] 15.4 III-V-group nitride crystals

[19a-Z27-2] Improvement of crystalline quality of AlN template through very tiny pits

〇Ryo Okuno¹, Ryouta Hidaka², Takahiro Saitou², Narihito Okada², Norihito Maeda³, Msa Jou³, Hideki Hirayama³, Sou Kurai², Youichi Yamada², Kazuyuki Tadatomo² (1.Yamaguchi Univ., 2.Grad. School of Sci. & Tech. for Innovation, Yamaguchi Univ, 3.RIKEN)

Keywords:AlN, MOVPE