The 68th JSAP Spring Meeting 2021

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15 Crystal Engineering » 15.7 Crystal characterization, impurities and crystal defects

[19a-Z29-1~9] 15.7 Crystal characterization, impurities and crystal defects

Fri. Mar 19, 2021 9:00 AM - 11:30 AM Z29 (Z29)

Susumu Maeda(GWJ), Haruo Sudo(GlobalWafers)

10:00 AM - 10:15 AM

[19a-Z29-5] Thermal behavior of hydrogen in silicon substrate introduced from SiN film

〇Katsuto Tanahashi1, Katsuhiko Shirasawa1, Shunsuke Heito2, Hidetaka Takato1 (1.AIST, 2.KYOCERA)

Keywords:silicon, hydrogen, thermal behavior